CORPE Infrastructure

Department of Energy Technology - Aalborg University

Department of Physics and Nanotechnology - Aalborg University

NanoLab is the 1000 m2 university clean room with a broad range of equipment for processing and characterization of materials.

The facilities allow nanoscale cross sectioning of materials and components and precise analysis of structure and composition, for instance in a dual-beam scanning electron microscope/focused ion beam system. Prototypes of various elements of components can be fabricated using different types of lithography, etching techniques, and thin film deposition.

Materials and components can be analyzed with a number of different techniques such as microscopies (optical, SEM, AFM, STM), spectroscopies (optical, Raman, Auger), and structural analysis (XRD and electron diffraction).